Currently, none of the manufactured scanning electron microscopes do not allow measure the size of nanostructure in directions not lying in the plane of projection. But even in the plane projections transition from the object image to true size of the object is a complex and not always solvable problem. Consequently, none of the modern SEM is not suitable for monitoring nanoregions, where the properties depend on the size of the object in the directions and cut (habit). It is the solution to the problem of determining the true size of the object in directions, and his habit directed the proposed solution. This is the first physically real offer in the world, which is confirmed by expert opinion.